Extending the Life of Your Equipment

Sustainability is at the core of our approach. We focus on extending the lifespan of machines through regular maintenance and spare parts, helping our customers reduce their environmental impact.

Supported Tools

AOI Inspection:

August/Rudolph technologies: NSX95, NSX100, NSX105, NSX115, AXi930, AXi935, AXi940 and Onto F30

AMAT Defect Review SEM:

SEMVision DR-300 CX, SEMVision NextGEN, SEMVision G2, SEMVision G3, SEMVision G4, SEMVision G5, SEMVision G6

AMAT Critical Dimension SEM CD-SEM:

VeraSEM 3D, NanoSEM 3D, VeritySEM, VeritySEM II, VeritySEM III, VeritySEM NextGEN, VeritySEM 4i (4i+), VeritySEM 5i, VeritySEM 6i

AMAT Darkfield Patterned Wafer Systems:

Compass 200, Compass 300, ComPLUS 2T, ComPLUS 3/3T, ComPLUS

Discover a Small Selection of Spare Parts

If You Don’t Find What You Need, Just Contact Us!

Can’t Find the Spare Part You Need?

Please contact us, we are happy to assist you.