Green Technology Investments
Since 2012, Green Technology Investments has been providing Inspection and Metrology solutions for Critical Dimension SEM, Defect Review SEM, and Darkfield Inspection applications, utilizing systems based on Applied Materials© equipment. GTi delivers fully remanufactured systems, maintains an extensive inventory of ready-to-ship spare parts, and offers expert service, training and applications support.
VERITY NextGEN
Critical Dimension
VERITY NextGEN
Compound Semi Conductor | Advanced Packaging | HVM-High Volume Measurement
Compound Semiconductor Substrights, Glass, SIC
- 6″ / 150mm
- 8″ / 200mm
- 12″ / 300mm
Defect Review
SemVision NextGEN
Critical Dimension SEM AMAT
CD-SEM, DR SEM (with or without FIB)
With our Z-stage, you have the ability to process wafers of varying thicknesses, up to 2mm.
Compound Semi Conductor | Advanced Packaging | HVM-High Volume Measurement
Patterned Wafer Inspection
Compass dark‑field inspection patterned wafers down to 70 nm defect.
what makes us different
everything from a single source
Systems
SEMVision Defect Review
VeritySEM Critical Dimension
WF | Compass | Complus Darkfield Inspection
Spares
Over 60,000 parts in stock
Consumables and non-consumables
Legacy+Obsolesence upgrades
RS170 camera upgrade for all CD SEMS
Service
Hardware and Application support
Level 5 FSE’s
Flexible service support contracts
Size conversions + Chamber additions
Training
Basic tool operation, equipment tasks,
and troubleshooting
Advanced Applications for improved theoretical and operational knowledge
Foundry
150-300mm wafers
Special Wafer thicknesses
Exotic materials
Calibration wafers
Demo
World-class facility calibrated to NIST standards.
Defect Review and CD Measurement
Are you interested?
Contact Us
We would love to speak with you.
Feel free to reach out using the below details.
