Since 2012, GTi has been providing Inspection and Metrology solutions for Critical Dimension SEM, Defect Review SEM, and Darkfield Inspection applications, utilizing systems based on Applied Materials© equipment. GTi delivers fully remanufactured systems, maintains an extensive inventory of ready-to-ship spare parts, and offers expert service, training and applications support.
what makes us different
everything from a single source
Systems
SEMVision Defect Review
VeritySEM Critical Dimension
WF | Compass | Complus Darkfield Inspection
Spares
Over 60,000 parts in stock
Consumables and non-consumables
Legacy+Obsolesence upgrades
RS170 camera upgrade for all CD SEMS
Service
Hardware and Application support
Level 5 FSE’s
Flexible service support contracts
Size conversions + Chamber additions
Training
– Basic tool operation, equipment tasks,
and troubleshooting
– Advanced Applications for improved theoretical and operational knowledge
Foundry
150-300mm wafers
Special Wafer thicknesses
Exotic materials
Calibration wafers
Demo
World-class facility calibrated to NIST standards.
Defect Review and CD Measurement
System overview
All Systems Remanufactured in the USA
Defect Review SEM
DR-SEM
- SEMVision DR-300 CX
- SEMVision NextGEN
- SEMVision G2
- SEMVision G3
- SEMVision G4
- SEMVision G5
- SEMVision G6
Critical Dimension
SEM
CD-SEM
- VeraSEM 3D
- NanoSEM 3D
- VeritySEM
- VeritySEM II
- VeritySEM III
- VeritySEM NextGEN
- VeritySEM 4i (4i+)
- VeritySEM 5i
- VeritySEM 6i
Darkfield
Patterned Wafer
- Compass 200
- Compass 300
- ComPLUS 2T
- ComPLUS 3/3T
- ComPLUS 4/4T
Want more informations?
We would love to speak with you.
Feel free to reach out using the details.
Official Representation in Europe:
- Hauptstraße 64, 79348 Freiamt, Germany
- [email protected]
- +49 7645 9179751
